microfabricationprocessofvaporcellsforchipscaleatomicclocks

NTSC-IR > 量子频标研究室

	microfabricationprocessofvaporcellsforchipscaleatomicclocks
	Zhang YJ(张彦军)1; Li YC(李云超)1; Hu XW(胡旭文)1; Zhang L(张璐)1; Liu ZJ(刘召军)1; Zhang KF(张开放)1; Mou SH(牟仕浩)1; Zhang SG(张首刚)2 ; Yan SB(闫树斌)1
	2019
发表期刊	中国光学快报英文版
ISSN	1671-7694
卷号	017 期号:004 页码:10
摘要	As the key part of chip-scale atomic clocks(CSACs), the vapor cell directly determines the volume, stability,and power consumption of the CSAC. The reduction of the power consumption and CSAC volumes demands the manufacture of corresponding vapor cells. This overview presents the research development of vapor cells of the past few years and analyzes the shortages of the current preparation technology. By comparing several different vapor cell preparation methods, we successfully realized the micro-fabrication of vapor cells using anodic bonding and deep silicon etching. This cell fabrication method is simple and effective in avoiding weak bonding strengths caused by alkali metal volatilization during anodic bonding under high temperatures.Finally, the vapor cell D2 line was characterized via optical-absorption resonance. According to the results,the proposed method is suitable for CSAC.
语种	英语
资助项目	[National Key Research and Development Program of China] ; [National Natural Science Foundation of China] ; [Natural Science Foundation of Shanxi Province] ; [Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province] ; [Program for the Top Young and Middle-Aged Innovative Talents of Higher Learning Institutions of Shanxi] ; [Fund for Shanxi '1331 Project' Key Subject Construction]
文献类型	期刊论文
条目标识符	http://210.72.145.45/handle/361003/9690
专题	量子频标研究室
作者单位	1.中北大学 2.中国科学院国家授时中心
推荐引用方式 GB/T 7714	Zhang YJ,Li YC,Hu XW,et al. microfabricationprocessofvaporcellsforchipscaleatomicclocks[J]. 中国光学快报英文版,2019,017(004):10.
APA	张彦军.,李云超.,胡旭文.,张璐.,刘召军.,...&闫树斌.(2019).microfabricationprocessofvaporcellsforchipscaleatomicclocks.中国光学快报英文版,017(004),10.
MLA	张彦军,et al."microfabricationprocessofvaporcellsforchipscaleatomicclocks".中国光学快报英文版 017.004(2019):10.