microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding

doi:10.3788/COL201917.100201

NTSC-IR > 量子频标研究室

	microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding
	Zhang Lu 1; Zhang Wendong 1; Zhang Shougang2 ; Yan Shubin 1
	2019
发表期刊	chineseopticsletters
ISSN	1671-7694
卷号	17 期号:10
摘要	A vapor cell provides a well-controlled and stable inner atmosphere for atomic sensors, such as atomic gyroscopes, atomic magnetometers, and atomic clocks, and its hermeticity affects the stability and aging of atomic sensors. We present the micro-fabrication of a micro-electromechanical system wafer-level hermit vapor cell based on deep reactive ion etching and vacuum anodic-bonding technology. The anodic-bonding process with the voltage increasing in steps of 200 V had a critical influence on vapor cell hermeticity. Further, the silicon-glass bonding surface was experimentally investigated by a scanning electron microscope, which illustrated that there were no visual cracks and defects in the bonding surface. The leak rate was measured using a helium leak detector. The result shows that the vapor cells with different optical cavity lengths comply with the MIL-STD-883E standard (5 x 10(-8) mbar.L/s). Moreover, D2 absorption spectroscopy was characterized via optical absorption. The bonding strength was determined to be 13 MPa, which further verified the quality of the vapor cells.
关键词	CLOCKS
DOI	10.3788/COL201917.100201
语种	英语
资助项目	[National Key Research and Development Program of China] ; [National Natural Science Foundation of China] ; [Natural Science Foundation of Shanxi Province]
引用统计
文献类型	期刊论文
条目标识符	http://210.72.145.45/handle/361003/9380
专题	量子频标研究室
作者单位	1.中北大学 2.中国科学院国家授时中心
推荐引用方式 GB/T 7714	Zhang Lu,Zhang Wendong,Zhang Shougang,et al. microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding[J]. chineseopticsletters,2019,17(10).
APA	Zhang Lu,Zhang Wendong,Zhang Shougang,&Yan Shubin.(2019).microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding.chineseopticsletters,17(10).
MLA	Zhang Lu,et al."microfabricationandhermeticitymeasurementofalkaliatomvaporcellsbasedonanodicbonding".chineseopticsletters 17.10(2019).